[YAMASHITA DENSO]山下電装株式会社

Surface defect inspection system

Surface defect inspection system (normal type)

表面欠陥検査装置(通常タイプ)

It is a system that can inspect the surface condition of specular planar substrate instantaneously with ultra-high sensitivity, applying the principle of a magic mirror transmitted from long ago, and is used by silicon wafer manufacturers all over the world. The inspection can be done non-contact / nondestructively, and the optical system is maintenance free. Optionally, automatic judgment of surface defects It is possible to add functions such as image processing / automatic conveying mechanism / image storage / image printing.

製品の特長

  • 1It instantaneously expresses all the surface condition.
  • 2Optical system corresponds to Class 1.
  • 3The optical system is maintenance free.
  • 4Detection sensitivity change is possible depending on inspection contents.
Inspection size φ 100 mm to φ 300 mm from each model
Inspection content Flatness, dimple, mound, saw mark, orange peel etc.
Inspection magnification 1-3 times mode switching (Standard feature)
Detection sensitivity Continuous detection sensitivity variable
Used light source 550 nm (constant illuminance stabilized light source)
Camera high resolution CCD camera
Stage manual stage (standard specification)
Utility
Surface inspection of specular wafer
Inspection of slip line
Inspection of glass substrate
Inspection of other specular substrates
Option
Motor driven test stage
Automatic defect determination image processing device
Image printer
Transport mechanism
  • * Demonstration is always available at our company.
  • * Sending the sample, it is also possible to return the inspection result by image copy.
COMPANY INFORMATION
CONTACT

Please feel free to contact us

042-650-7121

reception time
9:00~18:00(weekday)

contact from an email

ACCESS
Head Office
5-25-10 kitanodai,hachioji-shi,TOKYO
Business Office
2161-14 miyama-cho,hachioji-shi,TOKYO
Factory
2161-14 miyama-cho,hachioji-shi,TOKYO