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Various parts
Wavelength selection elliptical mirror
Select the elliptical mirror according to the wavelength range (DUV, UV, all wavelengths) to be used. By using the wavelength selective plane mirror and the filter together, the narrow band irradiation spectrum can be obtained. (254 nm, 313 nm, 365 nm, 405 nm, 436 nm)
Wavelength selection elliptical mirror
Select the elliptical mirror according to the wavelength range (DUV, UV, all wavelengths) to be used. By using the wavelength selective plane mirror and the filter together, the narrow band irradiation spectrum can be obtained. (254 nm, 313 nm, 365 nm, 405 nm, 436 nm)
Bandpass filter
波長選択楕円ミラー、平面ミラーを併せて使用することにより、ナローバンドの照射スペクトルが得られます。
（254nm, 313nm, 365nm, 405nm, 436nm）
特に耐熱性に優れ、熱による波長シフトが起こりません。