Surface defect inspection system

High magnification surface defect inspection system (magnifying magic mirror)


It is a high magnification inspection device of YIS series and displays a field of view of 10 mm on the monitor. It is widely used especially for inspection of slip lines occurring after epi processing. It is also effective for surface inspection of hard disks and optical polished parts. The detectable sensitivity is 50 times magnification of the Nomarski microscope.

Product features

  • 1It instantaneously expresses all the surface condition.
  • 2Optical system corresponds to Class 1.
  • 3The optical system is maintenance free.
  • 4Detection sensitivity change is possible depending on inspection contents.
Inspection size φ 100 mm to φ 300 mm from each model
Inspection content Flatness, dimple, mound, saw mark, orange peel etc.
Inspection magnification 1/3 times mode switching (standard equipment)
Detection sensitivity Continuous detection sensitivity variable
Used light source 550 nm (constant illuminance stabilized light source)
Camera high resolution CCD camera
Stage manual stage (standard specification)
Surface inspection of specular wafer
Inspection of slip line
Inspection of glass substrate
Inspection of other specular substrates
Motor driven test stage
Automatic defect determination image processing device
Image printer
Transport mechanism
  • ※ 常時、弊社にてデモンストレーションが可能です。
  • ※ サンプルをご送付頂き、検査結果をイメージコピーにてご返送することも可能です。

Please feel free to contact us


reception time

contact from an email

Head Office
5-25-10 kitanodai,hachioji-shi,TOKYO
Business Office
2161-14 miyama-cho,hachioji-shi,TOKYO
2161-14 miyama-cho,hachioji-shi,TOKYO